Optimum reactive ion etching of x-cut quartz using SF6 and Ar

Published in Journal of micromechanics and microengineering: structures, devices, and systems, 2013

Recommended citation: Minnick, M D, Devenyi, G A, Kleiman, R N, "Optimum reactive ion etching of x-cut quartz using SF6 and Ar." Journal of micromechanics and microengineering: structures, devices, and systems, 2013. https://iopscience.iop.org/article/10.1088/0960-1317/23/11/117002/meta